Work

Effects of working pressure on structure and properties of Al-containing amorphous carbon films prepared by high-power impulse magnetron sputtering

Year: 2019

Type: article

Source: Journal of Alloys and Compounds

DOI: 10.1016/j.jallcom.2019.152587

Authors: Ya-Li Peng, Chao-Qian Guo, Song-Sheng Lin, Qian Shi, Chun-Bei Wei, Yi-Fan Su, Yi-Qian Wu, Peng Tang, Xia-Gao Zhu, Ming-Jiang Dai

Institutions: Central South University, Guangdong Institute of New Materials, South China University of Technology

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Natural Science Foundation of Guangdong Province, Guangdong Science and Technology Department, Guangzhou Science, Technology and Innovation Commission, Guangzhou Science and Technology Program key projects, Guangdong Academy of Sciences

Awards: G1166825316, G2022209605, G5184321119, G7388519900

OpenAlex ID: W2980068280

FWCI: 0.668

Cites: 62

Cited by: 16

Related to: 10