Optical characterization of sputtered aluminum nitride thin films – correlating refractive index with degree of c-axis orientation
Year: 2019
Type: article
Source: Thin Solid Films
Authors: A. Ababneh, Z. Albataineh, A.M.K. Dagamseh, I.S. Al-kofahi, B. Schäfer, T. Zengerle, K. Bauer, H. Seidel
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Deutsche Forschungsgemeinschaft
Award: G5682084596
OpenAlex ID: W2983508142