Work

Laser-induced spatially-selective tailoring of high-index dielectric metasurfaces

Year: 2019
Type: article
Abstract: Optically resonant high-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances are usually fabricated by means of planar technologies, which limit the degrees of freedom in tunability and scalability of the fabricated systems. Therefore, we propose a complimentary post-processing technique based on ultrashort (≤ 10 ps) laser pulses. The process involves thermal effects: crystallization and reshaping, while the heat is localized by a high-precision positioning of the focused laser beam. Moreover, for the first time, the resonant behavior of dielectric metasurface elements is exploited to engineer a specific absorption profile, which leads to a spatially-selective heating and a customized modification. Such technique has the potential to reduce the complexity in the fabrication of non-uniform metasurface-based optical elements. Two distinct cases, a spatial pixelation of a large-scale metasurface and a height modification of metasurface elements, are explicitly demonstrated.
Authors: Jonas Berzinš, Simonas Indrišiūnas, Stefan Fasold, Michael Steinert, Olga Žukovskaja, Dana Cialla-May, Paulius Gečys, Stefan M. B. Bäumer, Thomas Pertsch, Frank Setzpfandt
Language: English
Open Access status: gold
Estimated APC paid: $2,270
OpenAlex ID: W2995119204
FWCI: 0.867
Cites: 66
Cited by: 22
Related to: 10