Work

Two-Electrode Ion-Extraction System of a Radio-Frequency Ion Source: Numerical and Experimental Studies of Erosion of the Accelerating Electrode

Year: 2019

Type: article

Source: Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques

DOI: 10.1134/s1027451019060235

Authors: R. V. Akhmetzhanov, A. V. Bogatyi, E. V. Vorob’ev, D. V. Dukhopel’nikov, D. A. Kashirin, V. A. Obukhov, G. A. Popov, V. V. Svotina, M. V. Cherkasova

Institutions: Moscow Aviation Institute, Bauman Moscow State Technical University

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2998237249

FWCI: 0.181

Cites: 6

Cited by: 3

Related to: 10