Work

Nanocutting mechanism of 6H-SiC investigated by scanning electron microscope online observation and stress-assisted and ion implant-assisted approaches

Year: 2020

Type: article

Source: The International Journal of Advanced Manufacturing Technology

DOI: 10.1007/s00170-019-04886-6

Authors: Zongwei Xu, Lei Liu, Zhongdu He, Dongyu Tian, Alexander Hartmaier, Junjie Zhang, Xichun Luo, Mathias Rommel, Kai Nordlund, Guoxiong Zhang, Fengzhou Fang

Institutions: Tianjin University, Ruhr University Bochum, Harbin Institute of Technology, University of Strathclyde, Fraunhofer Institute for Integrated Systems and Device Technology, University of Helsinki, Helsinki Institute of Physics

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funders: National Natural Science Foundation of China, Ministry of Education of the People's Republic of China, State Administration of Foreign Experts Affairs, National Key Research and Development Program of China

Awards: G1053274664, G2163839712, G2423416395, G2669252650, G3104899355, G4478992656, G455119377, G4762785220, G5562895803, G559402946, G5594827057, G6488420435, G7300049374, G837114041, G838179108, G866292936, G9000329436

OpenAlex ID: W3000321010

FWCI: 1.649

Cites: 48

Cited by: 22

Related to: 10