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Инфракрасные детекторы на основе МЭМС микрокантилеверов

Year: 2016

Type: article

Authors: А.С. Войцеховский, Н.А. Кульчицкий, С.Н. Несмелов

Language: Russian

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3000440718

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