Effect of Mo and MoTi Serving as a Barrier Layer for Cu Source/Drain Electrodes on Performances of Amorphous Silicon and IGZO TFTs
Year: 2019
Type: conference-abstract
Authors: Chuanbao Luo, Qianyi Zhang, Ziran Li, Xuechao Ren, Xiaolong Meng, Dai Tian, Bisheng Mo, Xiaohu Wei, Xialiang Yuan, Shijian Qin
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W3000659607
