The Effect of Hydroxyethylidene Diphosphonic Acid on the Chemical Mechanical Polishing of Cobalt in H 2 O 2 Based Alkaline Slurries
Year: 2020
Type: article
Authors: Lianjun Hu, Guofeng Pan, Yi Xu, Hao Wang, Yiwen Zhang, Ru Wang, Chenwei Wang
Institution: Hebei University of Technology
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W3013203597