Work

Organosiloxane Monolayers Terminated with Amine Groups as Adhesives for Si Metallization

Year: 2020

Type: article

Source: ACS Applied Nano Materials

DOI: 10.1021/acsanm.0c00430

Authors: Ping-Heng Wu, Yu-Zhong Lai, Yan-Ping Zhang, Manik Chandra Sil, Po-Heng Henry Lee, Tzu-Chien Wei, Chih-Ming Chen

Institutions: National Chung Hsing University, Imperial College London, National Tsing Hua University

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3014298623

FWCI: 1.807

Cites: 29

Cited by: 20

Related to: 10