Work

Optical TSV Using Si-Photonics Integrated Curved Micro-Mirror

Year: 2019

Type: conference-paper

Source: IEEE International D Systems Integration Conference

DOI: 10.1109/3dic48104.2019.9058779

Authors: Akihiro Noriki, Isao Tamai, Yasuhiro Ibusuki, Akio Ukita, Satoshi Suda, Daisuke Shimura, Yosuke Onawa, Hiroki Yaegashi, Takeru Amano

Institution: Photonics Electronics Technology Research Association

Language: English

Topic: Photonic and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3016083641

FWCI: 0.395

Cites: 11

Cited by: 5

Related to: 10