Disposal of hexachlorodisilane and its hydrolyzed deposits
Year: 2020
Type: article
Authors: Yu-Jhen Lin, Thanh-Trung Nguyen, Mo-Geng Chin, Cheng-Chieh Wang, Chien-Ho Liu, Hsiao-Yun Tsai, Jenq-Renn Chen, Eugene Y. Ngai, Ram Ramachandran
Language: English
Subfield: Chemical Health and Safety
Field: Chemical Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W3017121968
