Work

Reconstruction of Continuous-Profile Blazed Gratings with Optical Scatterometry

Year: 2000

Type: article

Authors: Anu Huttunen, Ilkka Kallioniemi, Jyrki Saarinen

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3018073201

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Related to: 10