Work

Back-Side Release of Slot Waveguides for the Integration of Functional Materials in a Silicon Photonic Technology With a Full BEOL

Year: 2020

Type: article

Source: IEEE Transactions on Components Packaging and Manufacturing Technology

DOI: 10.1109/tcpmt.2020.3011149

Authors: Christian Mai, Patrick Steglich, Mirko Fraschke, Andreas Mai

Institutions: Leibniz Institute for High Performance Microelectronics, Technical University of Applied Sciences Wildau

Language: English

Topic: Photonic and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: European Regional Development Fund

Award: G2447321291

OpenAlex ID: W3045335532

FWCI: 1.029

Cites: 28

Cited by: 17

Related to: 10