Work

Design of a New XY Flexure Micropositioning Stage With a Large Hollow Platform

Year: 2020

Type: article

Abstract: This paper presents the design of a new flexure-based xy micropositioning stage with a large hollow platform, which is suitable for practical use with a microscope. The designed mechanism has a parallel-kinematic structure and is actuated by two voice coil motors. By employing multistage compound parallelogram flexures, the stage is designed as a four-layer structure, which produces a motion output platform with a large hollow space and large range of motion. Analytical modeling was carried out for parametric design of the stage. Evaluation results show that the designed xy stage exhibits a large safety factor and high natural frequency. Moreover, the large hollow platform is well-suited for practical applications with a microscope.

Source: Actuators

DOI: 10.3390/act9030065

Authors: Hanlun Zhang, Zehao Wu, Qingsong Xu

Institution: University of Macau

Language: English

Topic: Piezoelectric Actuators and Control

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $1,056

Funders: Universidade de Macau, Fundo para o Desenvolvimento das Ciências e da Tecnologia