Work

A Framework for Semi-Automated Fault Detection Configuration with Automated Feature Extraction and Limits Setting

Year: 2020

Type: conference-paper

Source: Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

DOI: 10.1109/asmc49169.2020.9185395

Authors: Haoshu Cai, Jianshe Feng, James Moyne, Jimmy Iskandar, Michael Armacost, Fei Li, Jay Lee

Institutions: University of Cincinnati, Applied Materials (United States)

Language: English

Topic: Fault Detection and Control Systems

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3083313538

FWCI: 1.875

Cites: 18

Cited by: 7

Related to: 10