Work

Photo-Microlithography Fabrication of the Parts of a Micro-Mechanical Calculator

Year: 2020

Type: book-chapter

Source: Advances in atom and single molecule machines

DOI: 10.1007/978-3-030-56777-4_3

Authors: Christian Bourgerette, Laure Noé, Sebastien Pinaud, Christian Joachim

Institutions: Centre National de la Recherche Scientifique, Centre d’Élaboration de Matériaux et d’Études Structurales, Université de Toulouse, National Institute for Materials Science, Research Center for Materials Nanoarchitectonics

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3086741330

FWCI: 0.815

Cites: 5

Cited by: 1

Related to: 10