Scaling effects and brittle fracture mechanisms in laser punching of PECVD SiO 2 films
Year: 2020
Type: article
Authors: I Sakaev, Y Berg, Z Kotler, A A Ishaaya
Institutions: Ben-Gurion University of the Negev, Tel Aviv University
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W3086788973