Work

Thomson Scattering Measurement of Electron Density and Temperature in a Microwave Plasma for Diamond Deposition

Year: 2001

Type: conference-abstract

Source: APS Annual Gaseous Electronics Meeting Abstracts

Authors: Soushi Narishige, S. Kitamura, Kungen Teii, Kenji Uchino, Katsunori Muraoka, T. Sakoda

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3093607262

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