Work

Al Implantation and Post Annealing Effects in n-Type 4H-SiC

Year: 2020

Type: article

Source: Journal of Nanoelectronics and Optoelectronics

DOI: 10.1166/jno.2020.2818

Authors: Woo-Young Son, Myeong-Cheol Shin, Michael Schweitz, Sang-Kwon Lee, Sang-Mo Koo

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3096597366

FWCI: 0.086

Cites:

Cited by: 1

Related to: 10