Work

A Novel Model of a Mode-Localized MEMS Accelerometer

Year: 2020

Type: article

Source: Doklady Physics

DOI: 10.1134/s1028335820100031

Authors: N. F. Morozov, D. A. Indeitsev, V. S. Igumnova, Ya. V. Belyaev, A. V. Lukin, I. A. Popov, L. V. Shtukin

Institutions: Russian Academy of Sciences, St Petersburg University, Institute of Problems of Mechanical Engineering, Peter the Great St. Petersburg Polytechnic University, State Research Center of the Russian Federation

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3099059591

FWCI: 0.602

Cites: 14

Cited by: 11

Related to: 10