Work

Calculation of the Ga+ FIB Ion Dose Distribution by SEM Image

Year: 2020

Type: article

Source: Semiconductors

DOI: 10.1134/s1063782620120246

Authors: M. I. Mitrofanov, G. V. Voznyuk, S. N. Rodin, W. V. Lundin, V. P. Evtikhiev, A. F. Tsatsulnikov, M. A. Kaliteevski

Institutions: Ioffe Institute, Russian Academy of Sciences, ITMO University

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3112104331

FWCI: 0.353

Cites: 4

Cited by: 6

Related to: 10