Sputtered titanium nitride films with finely tailored surface activity and porosity for high performance on-chip micro-supercapacitors
Year: 2021
Type: article
Source: Journal of Power Sources
Authors: Nana Sun, Dayu Zhou, Wenwen Liu, Aikui Li, Yunpeng Su, Peng Jiang, Yaozhong Zou, Shuyan Shi, Feng Liu
Language: English
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W3124001982
