Work

Detection of nano particles attached on thin films

Year: 2020

Type: conference-abstract

Abstract: The paper reports the detection of sub-100 nm particles, attached on SiO2-coated wafers, with ellipsometry. Particle attachment was carried out by using an industrial ink-jet printer that enables precise, accurate and reproducible particle attachment. The enhancement of the change of ellipsometric parameters was observed at particular wavelengths. This suggest that the optical interference within the films plays a crucial role in the change of polarization of the reflected light.

Source: The Proceedings of Conference of Kanto Branch

DOI: 10.1299/jsmekanto.2020.17e04

Authors: Eiichi KONDOH, Atsushi TAKAHASHI, Koki SHIMADA, Katsuya SUZUKI, Lianhua JIN, Satomi HAMADA, Ryota KOSHINO, Shohei SHIMA, Hirokuni HIYAMA

Institutions: University of Yamanashi, Ebara (Japan)

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: bronze

OpenAlex ID: W3135582239

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