Effects of sputtering gas on the microstructure of Ir thin films deposited by HiPIMS and pulsed DC sputtering
Year: 2021
Type: article
Source: Surface and Coatings Technology
Authors: S. Zenkin, A. Gaydaychuk, S. Linnik
Institution: Tomsk Polytechnic University
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Russian Science Foundation
OpenAlex ID: W3135813620