Work

Bandwidth and noise analysis of high-Q MEMS gyroscope under force rebalance closed-loop control

Year: 2021

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/1361-6439/abf32e

Authors: Feng Bu, Bo Fan, Dacheng Xu, Shuwen Guo, Heming Zhao

Institutions: Soochow University, Suzhou Vocational University, University of South China

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: 新型微型硅曲面壳形陀螺谐振结构的基础理论研究

OpenAlex ID: W3140975764

FWCI: 0.661

Cites: 26

Cited by: 26

Related to: 10