Work

Development of laser-terahertz emission microscope for inspecting the electrical faults in semiconductor devices

Year: 2004

Type: conference-paper

Source: Conference on Lasers and Electro-Optics

Authors: Yamashita, Kiwa, Tonouchi, Kawase

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3143537477

FWCI:

Cites:

Cited by:

Related to: 10