Work

Nano-motion stage for high speed and precision positioning on an X-Y plane

Year: 2009

Type: conference-paper

Source: Asia-Pacific Magnetic Recording Conference

DOI: 10.1109/apmrc.2009.4925423

Authors: Shigeki Mori, Yuudai Sato, Akira Sakurada, Akihiro Naganawa, Yotsugi Shibuya, Goro Obinata

Institutions: Akita Industrial Technology Center, Akita University, Nagoya University

Language: English

Topic: Piezoelectric Actuators and Control

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3147680385

FWCI:

Cites: 2

Cited by: 1

Related to: 10