Work

Lateral characteristic calibration of an atomic force microscope using a Cr atomic deposition grating

Year: 2021

Type: conference-paper

Source: IEEE International Conference on Nano/Micro Engineered and Molecular Systems

DOI: 10.1109/nems51815.2021.9451407

Authors: Junjie Wu, Xiaoyu Cai, Yuan Li, Yunxia Fu, Jiasi Wei

Institution: Shanghai Institute of Measurement and Testing Technology

Language: English

Topic: Advanced Measurement and Metrology Techniques

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Key Research and Development Program of China

Award: G7875482899

OpenAlex ID: W3173666845

FWCI: 0.67

Cites: 7

Cited by: 1

Related to: 10