Work

Numerical investigation on material removal mechanism in elliptical vibration cutting of single-crystal silicon

Year: 2021

Type: article

Source: Materials Science in Semiconductor Processing

DOI: 10.1016/j.mssp.2021.106019

Authors: Changlin Liu, Jianguo Zhang, Junjie Zhang, Jianning Chu, Xiao Chen, Junfeng Xiao, Jianfeng Xu

Institutions: Huazhong University of Science and Technology, Harbin Institute of Technology

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3173733763

FWCI: 1.301

Cites: 47

Cited by: 33

Related to: 10