Effect of sputtering power on piezoresistivity and interfacial strength of SiCN thin films prepared by magnetic sputtering
Year: 2021
Type: article
Source: Ceramics International
Authors: Minming Jiang, Ke Xu, Ningbo Liao, Beirong Zheng
Institution: Wenzhou University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G3954727680, G770741760
OpenAlex ID: W3203610322