Work

Noble gas control of diamond-like content and compressive stress in carbon films by arc-mixed mode high power impulse magnetron sputtering

Year: 2021

Type: article

Source: Surface and Coatings Technology

DOI: 10.1016/j.surfcoat.2021.127785

Authors: Behnam Akhavan, Rajesh Ganesan, David T.A. Matthews, David R. McKenzie, Marcela M.M. Bilek

Institutions: The University of Sydney, Feng Chia University, University of Twente

Language: English

Topic: Diamond and Carbon-based Materials Research

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: bronze

OpenAlex ID: W3205075976

FWCI: 1.137

Cites: 42

Cited by: 28

Related to: 10