Design analysis and fabrication of side-drive electrostatic micromotor by UV-SLIGA
Year: 2021
Type: article
Source: Journal of Micromanufacturing
Authors: Rahul Shukla, Gowtham Beera, Ankit Dubey, Varun P. Sharma, P. Ram Sankar, Rajnish Dhawan, Pragya Tiwari, A. K. Sinha
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W3207750002