Work

Local normal vector field formulation for polygonal building blocks in a Gabor representation

Year: 2020

Type: article

Abstract: The usage of a spatial spectral domain integral equation solver for electromagnetic scattering from dielectric objects provides a means to execute scattering simulations for lithography.We consider the extension of the local normal vector field formulation to support polygonal building blocks in a Gabor series representation of functions.

Source: TU/e Research Portal

Authors: S. Eijsvogel, Fahimeh Sepehripour, Ligang Sun, Roeland J. Dilz, Martijn C. van Beurden

Language: English

Topic: Electromagnetic Scattering and Analysis

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W3208435528

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