Work

Effects of gas adsorbed on solid surface during gas breakdown in electron cyclotron resonance discharges

Year: 2021

Type: article

Source: Plasma Sources Science and Technology

DOI: 10.1088/1361-6595/ac352d

Authors: S H Fu, Z F Ding

Institution: Dalian University of Technology

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: 大气压脉冲射频放电中斑图特性和斑图-辉光转化研究

OpenAlex ID: W3211034759

FWCI:

Cites: 63

Cited by: 2

Related to: 10