Work

Surface Defect Classification in Silicon Wafer Manufacturing Using Linear-Based Channeling and Rule-Based Binning

Year: 2021

Type: article

Source: Journal of Material Science & Engineering

Authors: Hao Hu, Kari Ullako, Xin Lai, Mingming Chao

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3211291967

FWCI:

Cites: 1

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Related to: 10