Work

Infrared optical properties of SiO2 films on silicon substrate under different temperatures

Year: 2021

Type: article

Source: Optical Engineering

DOI: 10.1117/1.oe.61.3.031204

Authors: Yugang Jiang, Huasong Liu, Jinlin Bai, Ziyang Li, Xiao Yang, Dan Chen, Jiahuan He, Lishuan Wang, Dandan Liu

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: 离子束溅射氧化物薄膜零维缺陷产生机制和控制技术研究, G1452574391, G549149368

OpenAlex ID: W3216936725

FWCI: 0.266

Cites:

Cited by: 11

Related to: 10