Work

A Capacitive Type Humidity Sensor Using a Polyimide Film for Hermeticity Measurement of Micro Packages

Year: 2004

Type: article

Source: Journal of Sensor Science and Technology

DOI: 10.5369/jsst.2004.13.4.287

Authors: Yong-Ho Kim, Yong-Jun Kim, Kyung-Il Kim, Joong-Hyun Kim

Language: English

Topic: Gas Sensing Nanomaterials and Sensors

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W33965775

FWCI:

Cites: 4

Cited by: 3

Related to: 10