Work

Deposition of Ta_2O_5 Thin Film and Application to SAW Devices. : T: Thin Film

Year: 1985

Type: article

Source: Japanese Journal of Applied Physics

Authors: Yasuhiko Nakagawa, Yasuo Gomi, Takanao Suzuki

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W368926470

FWCI:

Cites:

Cited by: 2

Related to: 10