Work

Quality Determination of Laser Scanning in Optical Mask Construction by Modulation Transfer Function

Year: 2015

Type: article

Source: انجمن اپتیک و فوتونیک ایران

Authors: Amir Hossein Shahbazi, Khosrow Madani Pour, A. Koohian

Institutions: University of Tehran, Amirkabir University of Technology

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W384656607

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Cites: 1

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Related to: 10