Work

A Modular CMOS Foundry Process for Integrated Piezoresistive Pressure Sensors

Year: 2006

Type: book-chapter

Source: Springer eBooks

DOI: 10.1007/3-540-27463-4_30

Authors: G. Dahlmann, G. Hölzer, S. Hering, U. Schwarz

Institution: X-Fab (Germany)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3961636

FWCI: 1.613

Cites: 4

Cited by: 4

Related to: 10