Work

Low temperature deposition SiO 2 films by SAPCVD

Year: 2007

Type: conference-paper

Source: International Conference on Circuits

Authors: H. Juárez, T. Díaz, M. Pacio, E. Rosendo, G. Garcı́a-Salgado, M. Rubín, Gerardo Figueroa, Arturo García, Carlos Iván del Valle Morales, Federico Mora

Institutions: Instituto Politécnico Nacional, Centro de Investigación y de Estudios Avanzados del Instituto Politécnico Nacional, Benemérita Universidad Autónoma de Puebla

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W406578403

FWCI:

Cites: 1

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Related to: 10