Work

Instrumentation Of A Variable Angle Scatterometer (VAS)

Year: 1983

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.934147

Authors: Fred D. Orazio, Jr., W. K. Stowell, Robert M. Silva

Language: English

Topic: Surface Roughness and Optical Measurements

Subfield: Instrumentation

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4205193308

FWCI:

Cites:

Cited by: 5

Related to: 10