Work

Micro-crack defects detection of semiconductor Si-wafers based on Barker code laser infrared thermography

Year: 2022

Type: article

Source: Infrared Physics & Technology

DOI: 10.1016/j.infrared.2022.104160

Authors: Chiwu Bu, Rui Li, Tao Liu, Runhong Shen, Jun Wang, Qingju Tang

Institutions: Harbin University of Commerce, Heilongjiang University of Science and Technology

Language: English

Topic: Thermography and Photoacoustic Techniques

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Natural Science Foundation of Heilongjiang Province, Harbin University of Commerce

OpenAlex ID: W4224282901

FWCI: 3.529

Cites: 28

Cited by: 43

Related to: 10