A Monte Carlo Study of the Silicon Film Growth From Molecular Beams
Year: 1989
Type: book-chapter
Source: Elsevier eBooks
Authors: L.N. ALEKSANDROV, A.N. KOGAN, N.P. TIKHONOVA
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4229685698
