Work

How to Protect Reticles from Electrostatic Damage

Year: 2018

Type: book

Source: SPIE eBooks

DOI: 10.1117/3.2514864

Author: Gavin C. Rider

Language: English

Topic: Electrostatic Discharge in Electronics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4243137713

FWCI: 0.148

Cites:

Cited by: 1

Related to: 10