Work

Chemical Vapor Deposition in Manufacturing

Year: 2014

Type: book-chapter

Source: Springer eBooks

DOI: 10.1007/978-1-4471-4670-4_30

Authors: Leszek A. Dobrzański, Daniel Pakula, Marcin Staszuk

Institutions: Silesian University of Technology, Institute of Advanced Manufacturing Technology

Language: English

Topic: Advanced Materials and Semiconductor Technologies

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4244900940

FWCI: 2.955

Cites: 35

Cited by: 10

Related to: 10