Work

Influence of the Process Conditions of a Polishing Rinse after CuCMP

Year: 2007

Type: book-chapter

Source: Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena

DOI: 10.4028/3-908451-46-9.375

Authors: Andrea Filippini, Sébastien Petitdidier, Chantal Trouiller, Alexandre Couvrat, Marie Christine Luche, Eric Sabouret

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4249599693

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