Work

High Performance MEMS IMU with ThELMA-Double Technology

Year: 2022

Type: conference-paper

Source: IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

DOI: 10.1109/inertial53425.2022.9787756

Authors: G. Gattere, F. Rizzini, L. Guerinoni, L. Falorni, C. Valzasina, F. Vercesi, L. Corso, G. Allegato

Institution: STMicroelectronics (Italy)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4281849129

FWCI: 0.777

Cites: 2

Cited by: 3

Related to: 10