Work

Optical path length self-calibration method based on form measured surface data

Year: 2022

Type: article

Source: Precision Engineering

DOI: 10.1016/j.precisioneng.2022.06.005

Authors: Takashi Miyawaki, Katsuyoshi Endo

Institutions: Nikon (Japan), Research Center for Precision Engineering, The University of Osaka

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

Funder: Ministry of Education, Culture, Sports, Science and Technology

OpenAlex ID: W4283080754

FWCI: 0.277

Cites: 17

Cited by: 4

Related to: 10