Work

Resolution-enhanced optical inspection system to examine metallic nanostructures using structured illumination

Year: 2022

Type: article

Source: Applied Optics

DOI: 10.1364/ao.457806

Authors: Taerim Yoon, Pil Un Kim, Heesang Ahn, Taeyeon Kim, Tae Joong Eom, Kyujung Kim, Jong-ryul Choi

Institutions: Pusan National University, LG (United States), LG (South Korea), Daegu-Gyeongbuk Medical Innovation Foundation

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

Funders: Korea Institute for Advancement of Technology, National Research Foundation of Korea

Awards: G1273369840, G246087467, G607613940, G8298500069

OpenAlex ID: W4285802191

FWCI: 0.069

Cites: 56

Cited by: 1

Related to: 10